Focusing on core components of AMHS, MeetFuture Technology has recently completed the independent research and development of the optical communication sensor E84, which has entered the stage of productization and mass production.
This product is a parallel 8-bit optical data transmission device designed based on the SEMI E84 protocol for semiconductors. It utilizes IR (infrared) to transmit and receive SEMI E84 bus signals between active and passive devices in a non-contact manner, and is widely used in semiconductor AMHS and other industrial automation logistics fields.
| MF-E84 Sensor
About E84
With the continuous evolution of advanced manufacturing processes, efficient automated material handling systems have become an indispensable part of modern semiconductor manufacturing. To achieve automated transfer of wafer carriers (such as FOUP/POD) between automated material handling systems (AMHS) and equipment loading ports (LP), the E84 sensor has emerged. This sensor transmits and receives data in a non-contact manner, enabling automated transfer processes. The precise signal transmission of the E84 sensor ensures the safety and accuracy of wafers during the transfer process.
