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PRODUCTS
CUSTOMER SUPPORT
NEWSROOM
ABOUT
Company Profile
Quality and Reliability
ESG Strategy
Careers
Contact Us
AMHS Total Solution
In Semiconductor Manufacturing
Catalogue
AMHS Transport Equipment
Overhead Hoist Transport（OHT）
Conveyor
Autonomous Mobile Robot（AMR）
AMHS Storage Purge Equipment
Foup/Pod Stocker
Reticle Stocker
Tower Stocker
Near Tool Buffer
Tool Loadport Station(TLP)
OHB Purge(OHBP)
Reticle Cabinet
Wafer Cassette Load Port Station(LPS)
E-Rack
AMHS Software System
AMHS Material Control System
AMHS Analysis & Monitoring System
AMHS Sensor Control
RFID Reader
SmartTag Reader
E84 Sensor
AMHS Transport Equipment
Overhead Hoist Transport（OHT）
Foup/Pod/Reticle
Product Details
Conveyor
Product Details
Autonomous Mobile Robot（AMR）
Foup/Pod
Product Details
Purchase
Consultation
+8621 5689 0890
