弥费科技全球领先的半导体AMHS整体解决方案供应商

Catalogue

Product Center

AMHS Transport Equipment

Overhead Hoist Transport（OHT） Conveyor Autonomous Mobile Robot（AMR）

AMHS Storage Purge Equipment

Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack

AMHS Software System

AMHS Material Control System AMHS Analysis & Monitoring System

AMHS Sensor Control

RFID Reader SmartTag Reader E84 Sensor

E-Rack

E-Rack enhances control and information tracking via information exchange with the upper system. It cooperates with relevant intelligent transport equipment to achieve closed-loop management of product transport.

Feature Highlights:

User-friendly man-machine interface

Stable system integration

Compatibility with multiple EAP communications

Quick deployment of devices

Software Description

E-Rack Software

The software supports multiple types of tag reading. It boasts a high reading success rate and good stability.

Feature Highlights:
▪ Supports a variety of communication protocols for easy integration with the host system.
▪ Enables handling history query.

Important Parameters

Technical Indicators	Parameters
Product Model	Foup	HA200
Storage Cell Position	16	16
RFID Read Rate	＞99.99%	＞99.99%
Flatness	±1°	±1°
Clean Grade	Class：100	Class：100