弥费科技全球领先的半导体AMHS整体解决方案供应商

Catalogue

Product Center

AMHS Transport Equipment

Overhead Hoist Transport（OHT） Conveyor Autonomous Mobile Robot（AMR）

AMHS Storage Purge Equipment

Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack

AMHS Software System

AMHS Material Control System AMHS Analysis & Monitoring System

AMHS Sensor Control

RFID Reader SmartTag Reader E84 Sensor

Reticle Cabinet

Reticle Cabinet functions as photomask pod storage equipment with an purging function. It is designed to store photomask pods for IC production in batches and ensures the quality of photomasks by filling them with pure gas.
For the first time in China, MeetFuture's Reticle Cabinet has achieved the ability to reduce the humidity of the photomask pod to below RH10% in a very short time, even with a very small flow rate.

Feature Highlights:

User-friendly man-machine interface

Stable system integration

Drawer design for mass storage

High-speed continuous purge

Compatibility with multiple EAP communications

Software Description

Reticle Cabinet Storage Cabinet Software System

Reticle Cabinet Software

The software provides real-time feedback on materials information, purge time, and purging stage for the current materials location. It also monitors the flow and generates alarms accordingly.

Feature Highlights:
▪ Supports touchscreen control
▪ Allows dynamic configuration of customer parameters
▪ Supports docking with EAP and MF FabScope systems

Important Parameters

Technical Indicators	Parameters
Dimensions (LWH)	2217mm1058mm1913mm
Weight (full/empty）	630kg&460kg
Self （Number of positions）	84
Storing POD Types	SMIF POD RSP3 RSP1
RFID read rate	≥99.999%
power supply	220V，50Hz，2A