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AMHS Transport Equipment
Overhead Hoist Transport（OHT） Conveyor Autonomous Mobile Robot（AMR）
AMHS Storage Purge Equipment
Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack
AMHS Software System
AMHS Material Control System AMHS Analysis & Monitoring System
AMHS Sensor Control
RFID Reader SmartTag Reader E84 Sensor
Overhead Hoist Transport（OHT）
Utilizing intelligent algorithm scheduling software, the OHT replaces cleanroom workshop personnel in carrying the wafer carrier. This enhances production efficiency and quality, realizes intelligent manufacturing, and reduces production costs.

Optional configuration: FOUP/POD/Reticle OHT
Feature Highlights:

More Compact OHT Structure

Increased Travel Speed

Quicker Pickup and Delivery

More Stable Wafer Cassette Transportation

Improved Orbital Diverging and Converging Flow Control

Software Description
MSTC OHT Control System
MeetFuture Smart Transport Controller
Performs OHT path planning and scheduling, utilizing path algorithms to find the optimal route among multiple options. Provides real-time traffic monitoring to avoid potential accident points. Connects with the MES's HOST, converts transmitted transport and control commands into AMHS control, and reports relevant status information to the HOST.

Application scenario: OHT path planning and dynamic scheduling control
Supporting Products
OHT Track System
Tower Lift
Carrier Lifting Calibration Platform
Belt Elevator
Fire Door
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Product Center
AMHS Transport Equipment
Overhead Hoist Transport（OHT） Conveyor Autonomous Mobile Robot（AMR）
AMHS Storage Purge Equipment
Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack
AMHS Software System
AMHS Material Control System AMHS Analysis & Monitoring System
AMHS Sensor Control
RFID Reader SmartTag Reader E84 Sensor
BACK
OHT Track System
Product Function
The OHT (Overhead Hoist Transport) track system is adeptly suspended from the clean room's ceiling, comprising straight and curved tracks, a non-contact power supply, and a communication network.
This system seamlessly connects all workstations, fulfilling stringent requirements for installation strength, precision, cleanliness, vibration control, and traffic efficiency. Such meticulous design ensures the OHT operates efficiently and stably on the tracks, achieving point-to-point handling capabilities.

Optional configuration: Single-layer rail/double-layer rail, non-redundant power supply/redundant power supply, N-type, Y-type, R-type, and other curved rails.
Feature Highlights：

For more complex handling needs, a two-tier rail system is available

The Rail Transit Control System (TCU) manages the smooth passage of the OHT on the track, optimizing handling efficiency

The CPS contactless power supply system utilizes power supply redundancy technology for uninterrupted power

Tower Lift
Product Function
The tower elevator facilitates the placement or lowering of the overhead traveling crane into the track for maintenance using the internal chain. It features a closed design for seamless connection between the OHT track and the ground tooling trolley.

Model：MLT-T30、 MLT-T30-A
Feature Highlights：

Enclosed Design Ensures Safety

Equipped with Safety Inspection Sensor

Protective Door Set for Ground Interface

Carrier Lifting Calibration Platform
Product Function
The OHT correction platform accurately adjusts the trolley's initial position for product placement. The platform can precisely correct the placement positions of four stations: OHB (left), OHB (right), STK, and LPS.

Configuration: 8"/12"
Feature Highlights：

Broad Range of Usage Scenarios

Convenient Operation

Belt Elevator
Product Function
The belt elevator efficiently places the OHT on the track or lowers it for maintenance. Connected to the ground tooling trolley via belt transport, it boasts an open design and compact size.

Model：MLT-B20
Feature Highlights：

Versatile and Unrestricted Usage Scenarios

Space-Saving

Equipped with Safety Inspection Sensor

Convenient Operation

Fire Door
Product Function
Installed adjacent to the FAB plant's workshop and at corridor-workshop junctions. Upon fire confirmation, the fire alarm system triggers the OHT system, and the fire door closes upon receiving the signal, effectively blocking the fire within the FAB.

Model：MFD-100
Feature Highlights：

Fire Endurance: 3 Hours

UL Fire Rated

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