Wafer Cassette Load Port Station(LPS)
The Load Port Station collaborates with OHT to load and unload FOUP via E84 communication, enabling seamless communication with the upper-level MCS/EAP system.

Optional configuration: Single port and double ports; Clamp
Feature Highlights:

User-friendly man-machine interface

Stable system integration

Load/Unload autonomous switching

SEMI S2 certified

Compatibility with multiple EAP communications

Available Clamp option

Software Description
LPS Software
LPS Software
The LPS Software provides a real-time display of the operational status of each platform (Port), encompassing operation mode, service status, sensor status, external IO output status, and Foup-related information.

Feature Highlights:
▪ Single client architecture, minimizing hardware requirements, easy to deploy and maintain, supporting a variety of databases.
▪ Accurate identification of product information, collaborating with the AMHS system to expedite product delivery and achieve optimal on-site product process operations.
▪ Reducing the risk of human transportation, cutting operating costs, and ensuring the best product quality.
Important Parameters
Technical IndicatorsParameters
Dimensions (L*W*H)

272(mm)*523(mm)*1720(mm)

Weight

150kg

Load (number of positions)

30kg

Vibration

<0.5G

Noise

≤70Db


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