Autonomous Mobile Robot（AMR）
Carries FOUP/POD on the floor of the semiconductor wafer factory and connects to MRC for task scheduling;
Facilitates handling between equipment and equipment, as well as between equipment and E-Rack.
Facilitates handling between equipment and equipment, as well as between equipment and E-Rack.
Feature Highlights:
User-friendly man-machine interface
Stable system integration
Docking with multiple devices
Certified with Semi S2, Semi S17 standards
Important Parameters
| Technical Indicators | Parameters |
| Loading Capacity | 2 Foups |
Clean Grade | Class100 |
MR Certification Standards | Semi S2，Semi S17 |
Endurance | 8h |
Charging mode | Manual battery replacement or automatic charging |
Charging Duration | 4h |
Navigation Mode | Safety Scan Laser, SLAM Scan |
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